Open time: 8 : 00 AM - 5 : 30 PM (Monday - Saturday)
Mitutoyo uses a type of linear guideway on the large XY stage that is highly regarded for excellent straightness and stability. This is one key element in the strategy to maximize geometrical accuracy – another is FEM analysis. Our designers used FEM techniques extensively during the design phase to ensure stage stability was optimal in any measurement situation. Thus, the
foundations for achieving the highest measuring accuracy were laid.
The XY stage is a massive, highly stable design created using mechanical techniques developed over Mitutoyo’s long years of experience in manufacturing precision measuring microscopes. Maximum stage loading is 30kgf (66lbf) and a range of useful fixtures is available that includes a wafer holder and swivel-center support.
These microscopes are equipped with highly accurate digital glass scales on all three axes. Mitutoyo produces glass scales in an underground laboratory where the temperature and humidity are constant throughout the year. The XY (stage) and Z (optical tube) displacements are displayed digitally.
ultra-precision small-sized gear 10X
Wafer 20X
Metal slope 20X
Metal marking 20X
Model No. | HyperMF-B2515B | |
Optical tube | Infinity-correction optical system BD (Bright /Dark field) | |
Standard reticle (Built-in) | 90° broken-cross line (line width 5μm) | |
Pupil distance adjustment | Siedentoph type Adjustment range: 51 to 76mm / 2.01” to 2.99” | |
Optical path switching ratio | Observation/TVphotomicrography = 50/50 | |
Vertical tilt angle | Tilting | |
TV port | Provided as standard | |
Observation image | Erect image | |
Eyepiece | Magnification | 10X, 15X, 20X |
Objective lens (optional) | Equipped with two 10X eyepieces | |
ML series objective lens | – | |
BF (Bright field) | M Plan Apo, M plan Apo SL, G plan Apo | |
BD (Bright / Dark field) | BD Plan Apo, BD Plan Apo SL | |
Turret (optional) | BF (Bright field) | (Equipped with a four-hole manual sensor / motorized five-hole sensor*2 |
BD (Bright / Dark field) | (Equipped with a four-hole manual sensor / motorized four-hole sensor*3 | |
Focusing section | Maximum height of workpiece | 150mm / 5.91” |
Measuring accuracy | (1.5+0.01L) μm L: Measuring length (mm) | |
Drive method | Motorized control with the use of a joystick | |
Illumination unit | Transmitted illumination | Telecentric system, Built-in aperture diaphragm, Halogen bulb (12V, 50W), 100-step light intensity control, Fiber optics cable cold light illumination |
Reflected illumination unit | Koehler illumination, Variable aperture diaphragm mechanism, Halogen bulb (12V, 100W), 100-step light intensity control, Fiber optics cable cold light illumination | |
Workstage | Measuring range (X×Y) | 250mmx150mm / 9.84”x5.91” |
Measuring accuracy*4 (When no load is put on the X- or Y-axis) | (0.9+0.003L) μm L: Measuring length (mm) | |
Dimensions of the top plane | 460mmx350mm / 18.11”x13.78” | |
Usable dimensions of the stage glass | 300mmx200mm / 11.81”x7.87” | |
Swiveling angle | ±3° | |
Maximum loading mass | 30kgf / 66lbf | |
Drive method | Motorized control with the use of a joystick | |
Detector | High precision digital scale (Patented) | |
Digital display | Resolution | 0.01μm / .0004μinch |
Axes to be displayed | X, Y, Z | |
Data processing unit | QM-Data200 or Vision Unit | |
Joystick lock | Available | |
Fine pitch | Available | |
Data output | Available | |
Digital display reset | Available | |
Illumination light intensity control | Available | |
LAF (just focus) | – | |
LAF (tracking focus) | – | |
Turret remote control | Available (when installing a motorized turret) | |
External dimensions | Microscope main unit | 880mmx913mmx770mm / 34.65”x35.94”x30.31” |
Power unit | 160mmx476mmx381mm / 6.30”x18.74”x15” | |
Mass Approx. | Microscope main unit | Approx. 255kg / 562.2lb |
Power unit | 14kg / 30.86lb | |
Power supply | 100 – 240V AC, 50/60 Hz Maximum power consumption: 700W |