Open time: 8 : 00 AM - 5 : 30 PM (Monday - Saturday)
Available on backorder
Once you define the evaluation conditions, the Smart Experiment Manager saves you time by automatically creating the experiment plan. Then, just prepare your samples, put them on the stage, and press a button—the system does the rest.
Objectives designed for LEXT™ microscopes deliver highly accurate data, enabling us to guarantee the microscope’s measurement accuracy. Paired with the Smart Lens Advisor, you can acquire data that you can be confident in.
Easy to Use with Little Training
Experienced and novice users alike can acquire data quickly and easily with the Smart Scan II feature. Place the sample on the stage, press the start button, and the microscope does the rest.
A wide selection of imaging modes are available, including 1-area mode to simultaneously acquire a color image, laser image, and 3D shape data in a single field, and 1-line mode to acquire the shape of a single line in the center of the field. Film thickness mode is also available, enabling you to measure the thickness of a thin film.
Accurate data can be obtained from a wide field of up to 36 million pixels by stitching data in a planar direction. The target area can be easily specified on a macro map. The specified stitching area can be saved and recalled later.
Model | OLS5100-SAF | |
Total magnification | 54x–17,280x | |
Field of view | 16 µm–5,120 µm | |
Measurement principle | Optical system |
Reflection-type confocal laser scanning laser microscope Reflection-type confocal laser scanning laser-DIC microscope Color Color-DIC |
Light receiving element | Laser: Photomultiplier (2ch) | |
Color: CMOS color camera | ||
Height measurement | Display resolution | |
Dynamic range | 16 bits | |
Repeatability n-1 *1 *2 *5 | 5X : 0.45 μm, 10X : 0.1 μm, 20X : 0.03 μm, 50X : 0.012 μm, 100X : 0.012 μm | |
Accuracy *1 *3 *5 | 0.15 + L/100 μm (L: Measuring length [μm]) | |
Accuracy for stitched image *1 *3 *5 | 10X : 5.0+L/100 μm, 20X or higher : 1.0+L/100 μm (L: Stitching length [μm]) | |
Measurement noise (Sq noise) *1 *4 *5 | 1 nm [Typ] | |
Width measurement | Display resolution | 1 nm |
Repeatability 3 n-1 *1 *2 *5 | 5X : 0.4 μm, 10X : 0.2 μm, 20x : 0.05 μm, 50X : 0.04 μm, 100X : 0.02 μm | |
Accuracy *1 *3 *5 | Measurement value +/- 1.5% | |
Accuracy for stitched image *1 *3 *5 | 10X : 24+0.5L μm, 20X : 15+0.5L μm, 50X : 9+0.5L μm, 100X : 7+0.5L μm (L: Stitching length [mm]) | |
Maximum number of measuring points in a single measurement | 4096 × 4096 pixels | |
Maximum number of measuring points | 36 megapixels | |
XY stage configuration | Length measurement module | • |
Operating range |
100 mm × 100 mm (3.9 in. × 3.9 in.) Motorized |
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Maximum sample height | 100 mm (3.9 in.) | |
Laser light source | Wavelength | 405 nm |
Maximum output | 0.95 mW | |
Laser class | Class 2 (IEC60825-1:2007, IEC60825-1:2014) | |
Color light source | White LED | |
Electrical power | 240 W | |
Mass | Microscope body | Approx. 31 kg (68.3 lb) |
Control box | Approx. 12 kg (26.5 lb) |