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The base of the LEGEX is made from special spheroidal graphite ductile cast iron to a sealed-structure design that provides high rigidity and vibration attenuating characteristics. Mitutoyo engineers used FEM analysis during the design phase to optimize the final configuration and ensure outstanding geometric accuracy by minimizing deformations caused by normal machine operation.
To further increase rigidity and thermal stability, the Y-axis guide rail is integrated with the main unit base.
Ceramic plasma spraying is applied to sliding sections for the Y-axis guide rail, X-axis beam, and Z-axis spindle, creating surfaces suitable for highly accurate air-bearing operation. It also produces excellent corrosion resistance.
The LEGEX structure quickly attenuates traverse-induced vibrations and so reduces any adverse effect on measurements. This characteristic also allows ultra-high scanning accuracy to be realized.
The LEGEX uses a fixed-bridge type structure. This is the ideal CMM architecture and virtually eliminates pitch and yaw errors. Most other CMMs use a moving-bridge design with a single drive unit under the column, which tends to cause yawing and pitching during slide movements.
The fixed-bridge design of the LEGEX allows the axes to operate totally independently. Movement of the X-axis slide does not change the loading on the Y-axis slide, and so does not cause deformation. Also, the ‘center of gravity’ type drive system places the drive units near the center of gravity of each slide. This feature allows very high speed, highly accurate measurements by reducing inertia-induced deflections during acceleration and deceleration.
The LEGEX is hardened against floor induced vibration by use of ‘air-damped spring isolators’ with an auto-leveling function. This virtually eliminates factory floor vibrations from the entire machine structure.
The LEGEX is equipped with crystallized-glass scales with a resolution of 0.01μm and an ultra-low linear expansion coefficient of 0.01 x 10-6/K. This virtually zero thermal expansion coefficient means the LEGEX can maintain its extreme accuracy in spite of thermal changes. The scales are also mounted in a unique new way that reduces the hysteresis error to 1/5 that of previous models. The graphs below show the reduction in hysteresis error that results from this new mounting method.
While conventional very high accuracy CMMs require fairly strict temperature controlled environments, the LEGEX has been designed to improve the thermal stability of each component to minimize deformation. In addition, temperature sensors on each axis and for the workpiece itself detect temperature changes in real time and are used to compensate back to size at 20ºC.
Our proprietary control unit has been upgraded with sophisticated control technology that uses a new algorithm. A newly developed high-resolution linear encoder is also used to achieve higher accuracy.
Model | LEGEX 9106 |
Order No. | 356-363 |
Type | Fixed Bridge/Moving Table Ultra High Accuracy |
Image | – |
X-axis | 35.4″ (900mm) |
Y-axis | 39.3″ (1000mm) |
Z-axis | 23.6″ (600mm) |
Resolution | 0.00000039″ 0.01µm |
ISO10360-2:2009 (E0,MPE) | (0.35+L/1000)µm |
ISO 10360-4(MPETHP/MPTTHP) | 1.4µm / 150 seconds |
ISO10360-5:2010 (PFTU,MPE) | 0.45µm |
Material | Cast Iron (ceramic coating optional) |
Work Table Size | 37.40″ x 41.33″ (950mm x1050mm) |
Max Workpiece Height | 33.89″ (861mm) |
Max Workpiece Weight | 1763lbs (800kg) |
Mass (including stand and controller) |
14,330lbs (6500kg) |
Machine Dimensions WxDxH | 80.94×125.98×119.29″ (2056x3200x3030mm) |
Model | Height (H) | Width (W) | Depth (D) | A | B | C |
LEGEX 9106 | 3050mm | 1870mm | 3030mm | 1300mm | 720mm | 1461mm |