Open time: 8 : 00 AM - 5 : 30 PM (Monday - Saturday)
Open time: 8 : 00 AM - 5 : 30 PM (Monday - Saturday)
SE (Secondary Electron)
▷ Create images with the height level information. Mostly used for surface inspection
Convenient stage movement by 3-axis and able to operate easily and conveniently with mouse control in U.I
Able to get various analysis results with various scan modes measurement tool
| Resolution | 15nm (30kV, SE Image) |
| Magnification | 20x~60,000x |
| Accelerating Voltage | 1~30kV (1/5/10/15/20/30) |
| Detector | Secondary Electron Image(SE) |
| Electron Gun | Pre-centered Tungsten Filament Cartridge |
| Stage Traverse | 3-axis System (X, Y, R – Manual) |
| X, Y-axis : 40mm / R-axis : 360° | |
| * Image Shift : ±150μm | |
| * Tilt-axis : 0~45° (Option) | |
| Max. Sample Size | 70mm in Diameter x 30mm in Height |
| Automation Function | Auto Start, Auto Focus, |
| Auto Stigmator, Auto Contrast & Brightness | |
| Image Format | BMP, JPEG, PNG, TIFF |
| Vacuum Mode | High Vacuum |
| Vacuum Pump | Rotary Pump / Turbo Molecular Pump (Full Automation) |
| Main Unit | 390(W)x380(D)x560(H)mm, 83kg |
| Controller Unit | 390(W)x325(D)x560(H)mm, 37kg |
| Rotary Pump | 400(W)x160(D)x340(H)mm, 24kg |
