SNE-3000MS

Contact
SNE-3000MS
SEC
Contact

Available on backorder

Catalogue

The most appropriate Table-top SEM for the surface inspection with 10,000x of magnification which is main inspection range by SEM
Entry-level Table-top SEM with 15nm resolution & 60,000x magnification

SE (Secondary Electron)
▷ Create images with the height level information. Mostly used for surface inspection

 

Convenient stage movement by 3-axis and able to operate easily and conveniently with mouse control in U.I
Able to get various analysis results with various scan modes measurement tool

convenience4

Specifications

Resolution 15nm (30kV, SE Image)
Magnification 20x~60,000x
Accelerating Voltage 1~30kV (1/5/10/15/20/30)
Detector Secondary Electron Image(SE)
Electron Gun Pre-centered Tungsten Filament Cartridge
Stage Traverse 3-axis System (X, Y, R – Manual)
X, Y-axis : 40mm / R-axis : 360°
* Image Shift : ±150μm
* Tilt-axis : 0~45° (Option)
Max. Sample Size 70mm in Diameter x 30mm in Height
Automation Function Auto Start, Auto Focus,
Auto Stigmator, Auto Contrast & Brightness
Image Format BMP, JPEG, PNG, TIFF
Vacuum Mode High Vacuum
Vacuum Pump Rotary Pump / Turbo Molecular Pump (Full Automation)
Main Unit 390(W)x380(D)x560(H)mm, 83kg
Controller Unit 390(W)x325(D)x560(H)mm, 37kg
Rotary Pump 400(W)x160(D)x340(H)mm, 24kg
 
EDS System
Ion Sputter Coater
Applications