Measuring Laser Microscope
OLS5100-EAF

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OLS5100-EAF
Olympus
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Available on backorder

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Simplify Your Measurement Testing Workflow

Once you define the evaluation conditions, the Smart Experiment Manager saves you time by automatically creating the experiment plan. Then, just prepare your samples, put them on the stage, and press a button—the system does the rest.

Minimize Input Errors

Rather than manually inputting data into Excel cells, the software
automatically adds values to your experiment plan matrix, reducing the
chance of transcription errors that can lead to problems in the data. In
just a couple of clicks, you can export your experiment data to an Excel
spreadsheet.

 

 

 

 

 

Easy Data Access and Organization

You can click on each cell in the experiment plan, and the software will
automatically generate a file name that contains the evaluation conditions
for easy record keeping. Each file contains the associated
images and data.

 

 

 

 

 

 

 

 

Spot Issues Early

The software displays a color map that helps you better understand the
data being collected during your experiment. Intuitive chart layouts and
heat maps enable rapid data visualization so that if there are any issues,
they’re easier to spot and correct early in the process.

 

 

 

 

Data You Can Trust

Objectives designed for LEXT™ microscopes deliver highly accurate data, enabling us to guarantee the microscope’s measurement accuracy. Paired with the Smart Lens Advisor, you can acquire data that you can be confident in.

Reliable Data at the Push of a Button

Easy to Use with Little Training
Experienced and novice users alike can acquire data quickly and easily with the Smart Scan II feature. Place the sample on the stage, press the start button, and the microscope does the rest.

Extensive Data Acquisition Tools

Multiple data acquisition modes

A wide selection of imaging modes are available, including 1-area mode to simultaneously acquire a color image, laser image, and 3D shape data in a single field, and 1-line mode to acquire the shape of a single line in the center of the field. Film thickness mode is also available, enabling you to measure the thickness of a thin film.

High-resolution measurement across a wide field
Stitching mode

Accurate data can be obtained from a wide field of up to 36 million pixels by stitching data in a planar direction. The target area can be easily specified on a macro map. The specified stitching area can be saved and recalled later.

Application Images

Automotive/Metal Processing

Inner texture / Texture evaluation (Area roughness measurement)
(MPLAPON20XLEXT / 3 × 3 stitched)

Miniature Bearing / area roughness (MPLAPON20XLEXT)

Materials

Corrosion on stainless steel / Height measurement
(MPLAPON20XLEXT / 3 × 3 stitched)
Microchannels/ Profile measurement
(MPLAPON100XLEXT)

 

Electronic Components

 

Specifications

Model  OLS5100-EAF
Total magnification  54x–17,280x
Field of view  16 µm–5,120 µm
Measurement principle Optical system

Reflection-type confocal laser scanning laser microscope

Reflection-type confocal laser scanning laser-DIC microscope

Color

Color-DIC

Light receiving element Laser: Photomultiplier (2ch)
Color: CMOS color camera
Height measurement Display resolution   
Dynamic range 16 bits
Repeatability n-1 *1 *2 *5 5X : 0.45 μm, 10X : 0.1 μm, 20X : 0.03 μm, 50X : 0.012 μm, 100X : 0.012 μm
Accuracy *1 *3 *5 0.15 + L/100 μm (L: Measuring length [μm])
Accuracy for stitched image *1 *3 *5 10X : 5.0+L/100 μm, 20X or higher : 1.0+L/100 μm (L: Stitching length [μm])
Measurement noise (Sq noise) *1 *4 *5 1 nm [Typ]
Width measurement Display resolution 1 nm
Repeatability 3 n-1 *1 *2 *5 5X : 0.4 μm, 10X : 0.2 μm, 20x : 0.05 μm, 50X : 0.04 μm, 100X : 0.02 μm
Accuracy *1 *3 *5 Measurement value +/- 1.5%
Accuracy for stitched image *1 *3 *5 10X : 24+0.5L μm, 20X : 15+0.5L μm, 50X : 9+0.5L μm, 100X : 7+0.5L μm (L: Stitching length [mm])
Maximum number of measuring points in a single measurement  4096 × 4096 pixels
Maximum number of measuring points  36 megapixels
XY stage configuration Length measurement module
  Operating range

100 mm × 100 mm

(3.9 in. × 3.9 in.)

Motorized

Maximum sample height  210 mm (8.3 in.)
Laser light source Wavelength  405 nm
Maximum output 0.95 mW
Laser class Class 2 (IEC60825-1:2007, IEC60825-1:2014)
Color light source  White LED
Electrical power  240 W
Mass Microscope body  Approx. 43 kg (94.8 lb)
Control box Approx. 12 kg (26.5 lb)