Microscope
Hyper
MF-UD2515B

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MF-UD2515B
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Available on backorder

Concept

Inspecting complex microstructures of ever-decreasing size demands ever-higher accuracy from measuring microscopes used to satisfy the manufacturing and quality control principle of Observation plus Measurement. Mitutoyo is committed to providing microscopes that meet this requirement as well as exceeding users’ expectations in terms of sophisticated functionality and ergonomic features that allow fatigue-free use over extended periods of time.

Core Technology

Over many years Mitutoyo has made significant contributions to the technologies that are key to the core technology of manufacturing industry: measurement. The experience and expertise gained is reflected in the design and manufacture of each individual component of these microscopes and can be seen most clearly in their sublime integration of optics, mechanics, and electronics.

 

Ergonomic Design

The microscope main unit has been designed with the emphasis on user friendliness and ease of operation. Mitutoyo
has executed the mechanical design to allow easy operation. Even after extended use, its fatigue-fighting design still provides a comfortable work-experience for the operator.

 

 

World’s Highest Measuring Accuracy

Large, Highly Accurate XY Stage

Mitutoyo uses a type of linear guideway on the large XY stage that is highly regarded for excellent straightness and stability. This is one key element in the strategy to maximize geometrical accuracy – another is FEM analysis. Our designers used FEM techniques extensively during the design phase to ensure stage stability was optimal in any measurement situation. Thus, the
foundations for achieving the highest measuring accuracy were laid.

More about the XY Stage

The XY stage is a massive, highly stable design created using mechanical techniques developed over Mitutoyo’s long years of experience in manufacturing precision measuring microscopes. Maximum stage loading is 30kgf (66lbf) and a range of useful fixtures is available that includes a wafer holder and swivel-center support.

Highly Accurate Digital Scales

These microscopes are equipped with highly accurate digital glass scales on all three axes. Mitutoyo produces glass scales in an underground laboratory where the temperature and humidity are constant throughout the year. The XY (stage) and Z (optical tube) displacements are displayed digitally.

FS Optical System

The FS optical system is respected more than ever before for its ability to enable measurement, observation and analysis with a leading-edge combination of long working distance and high NA. This optical system ensures high operability when measuring deep holes, steps, etc., or when setting up

 

Tilting Optical Tube

To reduce fatigue due to extended use, it is important that the operator use a microscope in an unforced posture. The eyepiece unit allows stepless adjustment of tilt angle so that, no matter what their physique, operators can always adjust the viewing position for comfortable working during any measuring task.

LAF Optical Tube

The LAF (Laser AF) optical tube can be selected as an option. The LAF system achieves high
repeatability when measuring minute steps, etc., enabling difficult measurements with minimum fatigue.

 

ultra-precision small-sized gear 10X

Wafer 20X

 

Metal slope 20X

Metal marking 20X

 

Front Operation

Controls are arranged to fall within easy reach of the operator on two control panels at the front of the microscope. This allows the operator to concentrate on measurement without having to look away from the eyepieces. Membrane technology makes the switches very durable.

 

Specifications

Model No.  HyperMF-B2515B
Optical tube Infinity-correction optical system BD (Bright /Dark field)
Standard reticle (Built-in) 90° broken-cross line (line width 5μm)
Pupil distance adjustment Siedentoph type Adjustment range: 51 to 76mm / 2.01” to 2.99”
Optical path switching ratio  Observation/TVphotomicrography = 50/50
Vertical tilt angle  Tilting
TV port  Provided as standard
Observation image Erect image
Eyepiece  Magnification  10X, 15X, 20X
Objective lens (optional) Equipped with two 10X eyepieces
  ML series objective lens
  BF (Bright field) M Plan Apo, M plan Apo SL, G plan Apo
  BD (Bright / Dark field) BD Plan Apo, BD Plan Apo SL
Turret (optional) BF (Bright field) (Equipped with a four-hole manual sensor / motorized five-hole sensor*2
BD (Bright / Dark field) (Equipped with a four-hole manual sensor / motorized four-hole sensor*3
Focusing section Maximum height of workpiece 150mm / 5.91”
Measuring accuracy (1.5+0.01L) μm L: Measuring length (mm)
Drive method  Motorized control with the use of a joystick
Illumination unit Transmitted illumination Telecentric system, Built-in aperture diaphragm, Halogen bulb (12V, 50W), 100-step light intensity control, Fiber optics cable cold light illumination
Reflected illumination unit Koehler illumination, Variable aperture diaphragm mechanism, Halogen bulb (12V, 100W), 100-step light intensity control, Fiber optics cable cold light illumination
Workstage Measuring range (X×Y) 250mmx150mm / 9.84”x5.91”
Measuring accuracy*4 (When no load is put on the X- or Y-axis) (0.9+0.003L) μm L: Measuring length (mm)
Dimensions of the top plane 460mmx350mm / 18.11”x13.78”
Usable dimensions of the stage glass  300mmx200mm / 11.81”x7.87”
Swiveling angle  ±3°
Maximum loading mass  30kgf / 66lbf
Drive method  Motorized control with the use of a joystick
Detector  High precision digital scale (Patented)
Digital display Resolution 0.01μm / .0004μinch
Axes to be displayed X, Y, Z
Data processing unit QM-Data200 or Vision Unit
Joystick lock Available
Fine pitch Available
Data output Available
Digital display reset Available
Illumination light intensity control Available
LAF (just focus)
LAF (tracking focus)
Turret remote control Available (when installing a motorized turret)
External dimensions Microscope main unit  880mmx913mmx770mm / 34.65”x35.94”x30.31”
Power unit  160mmx476mmx381mm / 6.30”x18.74”x15”
Mass  Approx.  Microscope main unit Approx. 255kg / 562.2lb
Power unit 14kg / 30.86lb
Power supply  100 – 240V AC, 50/60 Hz Maximum power consumption: 700W

Dimensions