Semiconductor Inspection Microscope MX63L


Available on backorder


Advanced Analysis Tools

The MX63 series’ various observation capabilities provide clear, sharp images so users can reliably detect defects in their samples. New illumination techniques and image acquisition options within OLYMPUS Stream image analysis software give users more choices for evaluating their samples and documenting their findings.

The Invisible Becomes Visible: MIX Observation and acquisition

MIX observation technology produces unique observation images by combining darkfield with another observation method, such as brightfield, fluorescence, or polarization. MIX observation enables users to view defects that are difficult to see with conventional microscopes. The circular LED illuminator used for darkfield observation has a directional darkfield function where only one quadrant is illuminated at a given time. This reduces a sample’s halation and is useful for visualizing a sample’s surface texture.

Capture Both Bright and Dark Areas Using HDR

Using advanced image processing, high dynamic range (HDR) adjusts for differences in brightness within an image to reduce glare. HDR improves the visual quality of digital images thereby helping to generate professional-looking reports.

From Basic Measurement to Advanced Analysis

Measurement is essential to quality and process control and inspection. With this in mind, even the entry-level OLYMPUS Stream software package includes a full menu of interactive measurement functions, with all measurement results saved with image files for further documentation. In addition, the OLYMPUS Stream Materials Solution offers an intuitive, workflow-oriented interface for complex image analysis. At the click of a button, image analysis tasks can be executed quickly and precisely. With a considerable reduction in processing time for repeated tasks, operators can concentrate on the inspection at hand.


Reflected light microscopy spans a range of applications and industries. These are just a selection of examples of what can be achieved using different observation methods.

Darkfield / MIX with Brighfield

IC pattern on a semiconductor wafer

Darkfield is used to observe scattered or diffracted light from a sample. As only things that are not flat reflect this light, imperfections clearly stand out. Inspectors can identify even minute flaws. Darkfield is ideal for detecting minute scratches or flaws on a sample and examining mirror surface samples, including wafers.

Fluorescence / MIX with Darkfield

Photoresist residue on a semiconductor wafer

This technique is used for samples that fluoresce (emit light of a different wavelength) when illuminated with a specially designed filter cube that can be selected to the specific application. It is suitable for inspection of contamination on semiconductor wafers, photoresist residues, and detection of cracks through the use of fluorescent dye.

Transmitted Light / MIX with Brightfield

LCD color filter

This observation technique is suitable for transparent samples such as LCDs, plastics, and glass materials.






Differential Interference Contrast

Hard disk

Differential interference contrast (DIC) is an observation technique where the height of a sample, normally not detectable in brightfield, is visible as a relief, similar to a 3D image with improved contrast. It is ideal for inspections of samples having very minute height differences such as magnetic heads, hard-disk media, and polished wafers.

Polarized Light


Polarized light observations represent a material’s texture and crystal condition brightly. It is suitable for inspections of wafer and LCD structures.





Infrared (IR)

Electrode section

IR observation is suitable for nondestructive inspections of defects inside IC chips and other electronic devices constructed with silicon or glass that easily transmit IR wavelengths of light.







Optical system

UIS2 optical system (infinity-corrected system)

Microscope frame

Reflected light illumination

White LED(with Light Intensity Manager) 12 V 100 W halogen lamp, 100W mercury lamp 

Brightfield/darkfield/mirror cube manual changeover. (Mirror cube is optional.) 

3 position coded mirror units changed by manual operation 

Built-in motorized aperture diaphragm (Pre-setting for each objective, automatically full open for darkfield) 

Observation mode: brightfield, darkfield, differential interface contrast (DIC)*1, simple polarizing*1, fluorescence*1, infra-red*1 and MIX observation(4 directional darkfield)*2

*1 Optional mirror cube, *2 MIX observation configuration is required

Transmitted light illumination

Transmitted light illumination unit: MX-TILLA or MX-TILLB is required. 

– MX-TILLA: a condenser (NA 0.5) and an aperture stop 

– MX-TILLB: a condenser (NA 0.6), an aperture stop and a field stop 

Light source: LG-PS2 (12 V,100 W halogen lamp) Light guide: LG-SF 

Observation mode: brightfield, simple polarizing    


Stroke: 32 mm 

Fine stroke per rotation: 100 μm

Minimum graduation: 1μm  

Upper limit stopper and torque adjustment for coarse handle

Maximum load weight (including stage and holder)

15 kg

Observation tube

Wide-field (FN 22 mm)

Erect and trinocular: U-ETR4 

Erect, tilting and trinocular: U-TTR-2 

Inverted and trinocular: U-SWTR-3

Inverted and binocular: U-BI30-2 

Inverted, tilting and binocular: U-TBI30

Super-wide-field (FN 26.5 mm)

Erect, tilting and trinocular: MX-SWETTR (optical path switchover 100% (eyepiece) : 0 (camera) or 0 : 100%) 

Erect, tilting and trinocular: U-SWETTR (optical path switchover 100% (eyepiece) : 0 (camera) or 20% : 80%) 

Inverted and trinocular: U-SWTR-3

Motorized nosepiece


Motorized sextuple with a slider slot for DIC: U-D6REMC 

Motorized centerable quintuple with a slider slot for DIC: U-P5REMC

Brightfield and darkfield 

Motorized sextuple with a slider slot for DIC: U-D6BDREMC 

Motorized quintuple with a slider slot for DIC: U-D5BDREMC 

Motorized centerable quintuple with a slider slot for DIC: U-P5BDREMC

Stage (X × Y)

Coaxial right handle with built-in clutch drive: MX-SIC1412R2 

Stroke: 356 x 305 mm 

Transmitted light illumination area: 356 x 284 mm





Approx. 44kg(Microscope frame 28.5kg)