Open time: 8 : 00 AM - 5 : 30 PM (Monday - Saturday)
Open time: 8 : 00 AM - 5 : 30 PM (Monday - Saturday)
BSE(BackScattered Electron)
▷ Create images with material information(Elements)
Convenient stage movement by 3-axis and able to operate easily and conveniently with mouse control in U.I
Able to check and save both SE/BSE Images together at the same time with dual view mode
| Resolution | 15nm (30kV, SE Image) |
| 20nm (30kV, BSE Image) | |
| Magnification | 20x~60,000x |
| Accelerating Voltage | 1~30kV (1/5/10/15/20/30) |
| Detector | Secondary Electron Image(SE) |
| Backscattered Electron Image(BSE) | |
| Electron Gun | Pre-centered Tungsten Filament Cartridge |
| Stage Traverse | 3-axis System (X, Y, R, Z, T – Manual) |
| X, Y-axis : 35mm / R-axis : 360° | |
| * Image Shift : ±150μm | |
| * CCD Camera installed in the Chamber | |
| * T-axis : 0 to 45˚ (Option) | |
| Max. Sample Size | 70mm in Diameter x 30mm in Height |
| Automation Function | Auto Start, Auto Focus, |
| Auto Stigmator, Auto Contrast & Brightness | |
| Image Format | BMP, JPEG, PNG, TIFF |
| Vacuum Mode | High & Low Vacuum |
| Vacuum Pump | Rotary Pump / Turbo Molecular Pump (Full Automation) |
| Main Unit | 390(W)x380(D)x560(H)mm, 83kg |
| Controller Unit | 390(W)x325(D)x560(H)mm, 37kg |
| Rotary Pump | 400(W)x160(D)x340(H)mm, 24kg |
