Open time: 8 : 00 AM - 5 : 30 PM (Monday - Saturday)
SE (Secondary Eletron)
▷ Creat images with the height level informaiton. Mostly used for surface inspection
BSE(BackScattered Eletron)
▷ Create images with material information(Elements)
The only Table-top SEM of which has 5-axis, enables unlimited movement of stage
Easy and convenient image acquisition possible with “Click & Move” which is one of features of Motorized stage
Able to get images of variable angles via Tilting -45°~90°, and easily analyze EDS
“Tilting -45˚ to 90˚ degree”
Electron System | Resolution | Plus A : 5nm (30kV, SE Image) |
Plus B 5nm(SE), 8nm(BSE) | ||
Magnification | 20x~150,000x | |
Accelerating Voltage | 1~30kV (1/5/10/15/20/30) | |
Detector | Plus A : SE(Secondary Electron) | |
Plus B : SE/BSE(back Scattered Electron) *Dual Detector | ||
Electron Gun | Pre-centered Tungsten Filament Cartridge | |
Stage System | Stage Traverse | X : 40mm, Y : 40mm, R : 360˚, Z : 0 to 40mm, T : -45 to 90˚ |
5-axis Moterized | ||
Max. Sample Size | 80mm in Diameter x 35mm in Height | |
Image System | Automation Function | Auto Start, Auto Focus |
Image Format | BMP, JPEG, PNG, TIFF | |
Vacuum System | Vacuum Mode | Plus A : High Vacuum |
Plus B : High & Low Vacuum(Multi) | ||
Vacuum Pump | Rotary Pump / Turbo Molecular Pump (Full Automation) | |
Dimensions | Main Unit | 390(W)x380(D)x560(H)mm, 88kg |
Controller Unit | 390(W)x325(D)x560(H)mm, 37kg | |
Rotary Pump | 400(W)x160(D)x340(H)mm, 24kg |