Cost-effective Table-top SEM with Max. 100,000x of magnification by miniaturizing modules.
Able to scan images with high resolution of 5nm by installation of variable aperture with ease of use.
SE (Secondary Electron)
▷ Create images with the height level informaiton. Mostly used for surface inspection
The only Table-top SEM of which has 5-axis, enables simple and easy operation with unlimited movement of stage and mouse control system.
Able to get various analysis results with various scan modes measurement tool
|Resolution||5nm (30kV, SE Image)|
|Accelerating Voltage||1~30kV (1/5/10/15/20/30)|
|Detector||Secondary Electron Image(SE)|
|Electron Gun||Pre-centered Tungsten Filament Cartridge|
|Stage Traverse||5-axis System (X, Y, R, Z, T – Manual)|
|X, Y-axis : 40mm / R-axis : 360°|
|Z-axis : 0~35mm / Tilt-axis : 0~45°|
|* Image Shift : ±150μm|
|Max. Sample Size||80mm in Diameter x 35mm in Height|
|Automation Function||Auto Start, Auto Focus, Auto Stigmator, Auto Contrast & Brightness|
|Image Format||BMP, JPEG, PNG, TIFF|
|Vacuum Mode||High Vacuum (Low Vacuum Option)|
|Vacuum Pump||Rotary Pump / Turbo Molecular Pump (Full Automation)|
|Main Unit||390(W)x380(D)x560(H)mm, 88kg|
|Controller Unit||390(W)x325(D)x560(H)mm, 37kg|
|Rotary Pump||400(W)x160(D)x340(H)mm, 24kg|