Available on backorder


Cost-effective Table-top SEM with Max. 100,000x of magnification by miniaturizing modules.
Able to scan images with high resolution of 5nm by installation of variable aperture with ease of use.

SE (Secondary Electron)
▷ Create images with the height level informaiton. Mostly used for surface inspection

The only Table-top SEM of which has 5-axis, enables simple and easy operation with unlimited movement of stage and mouse control system.
Able to get various analysis results with various scan modes measurement tool



Resolution 5nm (30kV, SE Image)
Magnification 20x~100,000x
Accelerating Voltage 1~30kV (1/5/10/15/20/30)
Detector Secondary Electron Image(SE)
Electron Gun Pre-centered Tungsten Filament Cartridge
Stage Traverse 5-axis System (X, Y, R, Z, T – Manual)
X, Y-axis : 40mm / R-axis : 360°
Z-axis : 0~35mm / Tilt-axis : 0~45°
* Image Shift : ±150μm
Max. Sample Size 80mm in Diameter x 35mm in Height
Automation Function Auto Start, Auto Focus, Auto Stigmator, Auto Contrast & Brightness
Image Format BMP, JPEG, PNG, TIFF
Vacuum Mode High Vacuum (Low Vacuum Option)
Vacuum Pump Rotary Pump / Turbo Molecular Pump (Full Automation)
Main Unit 390(W)x380(D)x560(H)mm, 88kg
Controller Unit 390(W)x325(D)x560(H)mm, 37kg
Rotary Pump 400(W)x160(D)x340(H)mm, 24kg
EDS System
Ion Sputter Coater